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DSpace at Transilvania University >
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COMEC 2005 >
Please use this identifier to cite or link to this item:
http://hdl.handle.net/123456789/829
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| Title: | RESEARCH REGARDING SPECIFIC ISSUES OF PRESSURE MICROSENSORS CONCEPTUAL DESIGN |
| Authors: | LACHE, Simona |
| Keywords: | microsystem analysis
analytic models
simulation
pressure microsensor |
| Issue Date: | Oct-2005 |
| Publisher: | Transilvania University Press of Braşov |
| Citation: | GOOGLE SCHOLAR |
| Series/Report no.: | COMEC 2005;1-5 |
| Abstract: | Being a component of what we call today microsystems, or MEMS, pressure microsensors have specific features regarding design and manufacturing, taking into account the MST considerations. Due to the relatively high cost of prototypes, it is strongly recommended to use analytic models for simulation. This paper presents some aspects regarding design principles and results of the finite element modelling of a pressure microsensor. The analysis determines the stress distribution along the membrane due to different pressure loads. These results would allow the precise positioning of piezoresistors on the pressure sensor |
| URI: | http://hdl.handle.net/123456789/829 |
| ISBN: | 973 - 635 - 593 – 4 |
| Appears in Collections: | COMEC 2005
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